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Indium tin oxide (ITO) thin film gas sensor for detection of methanol at room temperature

被引：258
作者：
Patel, NG
Patel, PD
Vaishnav, VS
机构：
[1] Univ N Florida, Dept Chem & Phys, Jacksonville, FL 32224 USA
[2] Sardar Patel Univ, Dept Phys, Vallabh Vidyanagar 388120, Gujarat, India
[3] Sardar Patel Univ, Dept Elect, Vallabh Vidyanagar 388120, Gujarat, India
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 96卷 / 1-2期
关键词：
indium tin oxide; thin films gas sensors; methanol;
D O I：
10.1016/S0925-4005(03)00524-0
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Thin films of indium tin oxide (In2O3 + SnO2) (ITO) were grown on alumina substrate using the direct evaporation method. The sensing characteristics of these films to methanol vapors were studied at room temperature. The effects of different concentrations of tin oxide in indium oxide and film thickness on sensitivity were studied. The effects of thin layers of noble metals-Au, Ag, Pt and Cut on top of ITO films were studied. A novel approach of stimulated recrystallization of ITO film by depositing ITO film over ultra thin layer of Cu stimulator was used to improve the sensitivity, selectivity and minimum detection limit of methanol sensors operating at room temperature. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码：180 / 189
页数：10
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