CONDUCTING TRANSPARENT INDIUM TIN OXIDE-FILMS BY POSTDEPOSITION ANNEALING IN DIFFERENT HUMIDITY ENVIRONMENTS

被引：22

作者：

PATEL, NG ^{[1
]}

LASHKARI, BH ^{[1
]}

机构：

[1] VP & RPTP SCI COLL,VALLABH VIDYANAGAR 388120,GUJARAT,INDIA

来源：

JOURNAL OF MATERIALS SCIENCE | 1992年 / 27卷 / 11期

关键词：

D O I：

10.1007/BF01154114

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Indium-tin oxide (ITO) films were grown by the flash evaporation method without oxygen gas flow during deposition. The minimum electrical resistivity and the maximum average optical transmittance were found at the optimized substrate temperature of about 673 K. Further improvements in the electrical conductivity and the optical transmittance of ITO films were made by post-deposition annealing under different conditions of humidity. The effects of post-deposition annealing in the presence of the different conditions of humidity on the electrical as well as the optical properties of ITO films were studied. The values of the intrinsic bandgap and effective mass were calculated. The implications are discussed.

引用

页码：3026 / 3031

页数：6

共 29 条

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