VARIATIONS IN STRUCTURAL AND ELECTRICAL-PROPERTIES OF MAGNETRON-SPUTTERED INDIUM TIN OXIDE-FILMS WITH DEPOSITION PARAMETERS

被引：41

作者：

DUTTA, J

RAY, S

机构：

[1] Indian Assoc for the Cultivation of, Science, India

来源：

THIN SOLID FILMS | 1988年 / 162卷 / 1-2期

关键词：

The authors are grateful to Professor A. K. Barua for discussions and active interest in the problem. This work has been carried out under a project funded by the Department of Non-conventional Energy Sources; Government of India;

D O I：

10.1016/0040-6090(88)90200-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：119 / 127

页数：9

共 19 条

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