PREPARATION OF CONDUCTING AND TRANSPARENT THIN-FILMS OF TIN-DOPED INDIUM OXIDE BY MAGNETRON SPUTTERING

被引：160

作者：

BUCHANAN, M ^{[1
]}

WEBB, JB ^{[1
]}

WILLIAMS, DF ^{[1
]}

机构：

[1] NATL RES COUNCIL CANADA,DIV CHEM,OTTAWA K1A 0R6,ONTARIO,CANADA

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 02期

关键词：

D O I：

10.1063/1.91829

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：213 / 215

页数：3

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