Piezoelectric microactuator for dual stage control

被引：133

作者：

Evans, RB ^{[1
]}

Griesbach, JS

Messner, WC

机构：

[1] Hutchinson Technol Inc, Hutchinson, MN 55350 USA

[2] Carnegie Mellon Univ, Pittsburgh, PA 15213 USA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1999年 / 35卷 / 02期

关键词：

D O I：

10.1109/20.753819

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a piezoelectric-based microactuator concept that could provide an economical and easily integrated option for dual stage actuation used in rigid disk drives (RDDs). The design and operation of a prototype version is described. Manufacturability of the actuator and its integration in the RDD assembly is assessed. Approaches to providing the voltages required to drive the microactuator to achieve displacement specifications are shown. A model for the dynamic performance is shown, and experimental results are presented. Issues involving dual-input single-output control loop integration are discussed.

引用

页码：977 / 982

页数：6

共 11 条

[1] Disk drive rotary actuators: Characterization, prediction, and compensation [J].

Eddy, K ;

Steele, J ;

Messner, W .

IEEE TRANSACTIONS ON MAGNETICS, 1997, 33 (03) :2424-2436

[2]

FAN LS, 1996, IEEE T MAGN, V32, P1855

[3] Modeling piezoelectric stack actuators for control of micromanipulation [J].

Goldfarb, M ;

Celanovic, N .

IEEE CONTROL SYSTEMS MAGAZINE, 1997, 17 (03) :69-79

[4] Dual stage actuators for high density rotating memory devices [J].

Guo, W ;

Weerasooriya, S ;

Goh, TB ;

Li, QH ;

Bi, C ;

Chang, KT ;

Low, TS .

IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (02) :450-455

[5] Angular micropositioner for disk drives [J].

Horsley, DA ;

Singh, A ;

Pisano, AP ;

Horowitz, R .

MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, :454-459

[6] A flexural piggyback milli-actuator for over 5 Gbit/in(2) density magnetic recording [J].

Koganezawa, S ;

Takaishi, K ;

Mizoshita, Y ;

Uematsu, Y ;

Yamada, T ;

Hasegawa, S ;

Ueno, T .

IEEE TRANSACTIONS ON MAGNETICS, 1996, 32 (05) :3908-3910

[7]

KONEGANEZAWA S, 1998, JOINT MMM INTERMAG 9

[8] A DUAL STAGE MAGNETIC DISK DRIVE ACTUATOR USING A PIEZOELECTRIC DEVICE FOR A HIGH TRACK DENSITY [J].

MORI, K ;

MUNEMOTO, T ;

OTSUKI, H ;

YAMAGUCHI, Y ;

AKAGI, K .

IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) :5298-5300

[9]

Takaishi K., 1996, IEEE Transactions on Magnetics, V32, P1863, DOI 10.1109/20.492878

[10] SILICON MICROMACHINED ELECTROMAGNETIC MICROACTUATORS FOR RIGID DISK DRIVES [J].

TANG, WL ;

TEMESVARY, V ;

MILLER, R ;

DESAI, A ;

TAI, YC ;

MIU, DK .

IEEE TRANSACTIONS ON MAGNETICS, 1995, 31 (06) :2964-2966

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