Polymer microsystems by excimer laser ablation:: From rapid prototyping to large number fabrication

被引：9

作者：

Klotzbücher, T ^{[1
]}

Braune, T ^{[1
]}

Sigloch, S ^{[1
]}

Hossfeld, J ^{[1
]}

Neumeier, M ^{[1
]}

Bauer, HD ^{[1
]}

Ehrfeld, W ^{[1
]}

机构：

[1] Inst Mikrotechn Mainz GmbH, D-55129 Mainz, Germany

来源：

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING VI | 2001年 / 4274卷

关键词：

microtechnology; polymers; excimer laser ablation; rapid prototyping; Laser-LIGA;

D O I：

10.1117/12.432523

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Excimer laser ablation of polymers is demonstrated to be a well suited technology for cost effective fabrication of prototypes of polymer microstructures in relatively short times. Prototyping is realized by ArF excimer laser ablation (193 mn) using mask projection techniques in combination with high precision sample movement as well as mask movement. Different techniques and their restrictions in structural diversity are illustrated by examples from micro-optics, like fiber switches and waveguide couplers. Microparts the functionality of which has been proven by prototypes can be fabricated in large numbers by the Laser-LIGA technique. For the Laser-LIGA process a master structure is generated in PMMA that is coated onto a titanium wafer, using the same CNC data as for rapid prototyping without additional expenditure. From the PMMA master a mould insert of Ni or Cu can be generated by electroforming that allows time and cost effective mass fabrication via hot embossing or injection moulding if the required part numbers are large. Advantages and disadvantages of the laser ablation prototyping technique compared to other rapid prototyping methods are discussed and the Laser-LIGA technique is compared to the standard LIGA process using deep X-ray lithography.

引用

页码：307 / 315

页数：5

共 29 条

[1] COMBINATION OF EXCIMER-LASER MICROMACHINING AND REPLICATION PROCESSES SUITED FOR LARGE-SCALE PRODUCTION [J].