COMBINATION OF EXCIMER-LASER MICROMACHINING AND REPLICATION PROCESSES SUITED FOR LARGE-SCALE PRODUCTION

被引：69

作者：

ARNOLD, J ^{[1
]}

DASBACH, U ^{[1
]}

EHRFELD, W ^{[1
]}

HESCH, K ^{[1
]}

LOWE, H ^{[1
]}

机构：

[1] INST MIKROTECH GMBH,D-55071 MAINZ,GERMANY

来源：

APPLIED SURFACE SCIENCE | 1995年 / 86卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(94)00386-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Results are reported obtained by a process sequence comprising excimer laser ablation of microstructures, inverse replication by an electroplating process and second inverse replication by injection moulding (''Laser-LIGA''). Thus, the original microstructures, made from PMMA and novolak layers applying a commercial 193 nm excimer laser micromachining work-station and showing structural variety and aspect ratios up to 10, were replicated with high structural fidelity by a law cost process suited for large scale production.

引用

页码：251 / 258

页数：8

共 13 条

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