Interferometric measurement of surface roughness in engine cylinder walls

被引：24

作者：

Aziz, DJ ^{[1
]}

机构：

[1] Veeco Proc Metrol, Tucson, AZ 85706 USA

来源：

OPTICAL ENGINEERING | 1998年 / 37卷 / 05期

关键词：

interferometry; white-light interferometry; interference microscope; coherence sensing; surface roughness; surface metrology; engine cylinders;

D O I：

10.1117/1.601703

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper describes the application of white-light optical interferometry to the nondestructive inspection of engine cylinder surfaces. A system has been designed and built specifically for application of this technique to the measurement of in situ engine cylinder walls. The system produces a three-dimensional measurement of the surface height over a 0.9x 1.2 mm region. A number of measurement results are presented, some of which are unavailable with a two-dimensional measurement. (C) 1998 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(98)01005-8].

引用

页码：1429 / 1434

页数：6

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