Fabrication of submicron-sized copper structures on pre-patterned self-assembled monolayer and Langmuir-Blodgett films

被引：6

作者：

Choi, I ^{[1
]}

Kim, Y ^{[1
]}

Kang, SK ^{[1
]}

Lee, J ^{[1
]}

Yi, J ^{[1
]}

机构：

[1] Seoul Natl Univ, Sch Chem & Biol Engn, Inst Chem Proc, Seoul 151742, South Korea

来源：

KOREAN JOURNAL OF CHEMICAL ENGINEERING | 2005年 / 22卷 / 04期

关键词：

AFM anodic oxidation; copper; self-assembled monolayer; Langmuir-Blodgett film;

D O I：

10.1007/BF02706656

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The fabrication of a metal microstructure on pre-pattemed organic templates, prepared using SAM and LB techniques is described. The OTS derivatized substrate was oxidized by AFM anodic oxidation at the threshold voltage. Site-selective copper structure was then fabricated on the locally modified monolayer based on pre-designed patterns. The sequential adsorption-reduction of copper ion was carried out, leading to improved metal coverage and a reduction in defects.

引用

页码：635 / 638

页数：4

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