System for recording and analysis of reflection high-energy electron diffraction patterns

被引：15

作者：

Gur'yanov, GM ^{[1
]}

Demidov, VN ^{[1
]}

Korneeva, NP ^{[1
]}

Petrov, VN ^{[1
]}

Samsonenko, YB ^{[1
]}

Tsyrlin, GE ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Analyt Instrument Making, St Petersburg 198103, Russia

来源：

TECHNICAL PHYSICS | 1997年 / 42卷 / 08期

基金：

俄罗斯基础研究基金会;

关键词：

D O I：

10.1134/1.1258761

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An efficient and fast system for recording and analysis of reflection high-energy electron diffraction (RHEED) patterns is described. The software developed for this system includes three program packages: one for operating in the single-window mode, one for operating in the four-window mode, and one for the linear regime. Examples are given of the use of the system for monitoring and control of growth of III-V semiconductor compounds by molecular-beam epitaxy. Using this system, we discovered an effect wherein a periodic splitting of the RHEED peaks occurs during the growth of GaAs (100). (C) 1997 American Institute of Physics.

引用

页码：956 / 960

页数：5

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