Synthesis of nanocrystalline TiNi thin films by cluster beam deposition

被引：13

作者：

Barborini, E

Piseri, P

Mutti, S

Milani, P

Biasioli, F

Iannotta, S

Gialanella, S

机构：

[1] Univ Milan, Dipartimento Fis, INFM, I-20133 Milan, Italy

[2] ITC Res Ctr Aggregate Phys, CNR, CEFSA, I-38050 Povo Di Trento, Italy

[3] Univ Trent, Dipartimento Ingn Mat, Mesiano, TN, Italy

来源：

NANOSTRUCTURED MATERIALS | 1998年 / 10卷 / 06期

关键词：

D O I：

10.1016/S0965-9773(98)00140-8

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

Nanocrystalline TiNi thin films were produced by cluster beam deposition. A pulsed are gas aggregation source was used to generate intense and stable supersonic cluster beams. With this technique,films characterized by crystallite sizes of a few tens of nanometers can be obtained without recrystallization by thermal annealing. Films maintain the stoichiometry of the original TiNi alloy. Oxygen contamination is observed. (C) 1998 Acta Metallurgica Inc.

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页码：1023 / 1031

页数：9

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