Fields associated with the solid immersion lens

被引：10

作者：

Kino, GS ^{[1
]}

机构：

[1] Stanford Univ, Ginzton Lab, Stanford, CA 94305 USA

来源：

FAR- AND NEAR-FIELD OPTICS: PHYSICS AND INFORMATION PROCESSING | 1998年 / 3467卷

关键词：

solid immersion lens; near-field; focus; microscope; optical storage; lithography;

D O I：

10.1117/12.326811

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The principles of operation of the solid immersion lens (SIL) are described, Two types of Sn, the hemisphere and supersphere, and their tolerances, are discussed. Several applications of the SIL to microscopy, lithography, and optical storage are reviewed, along with a description of the theoretical considerations for determining the spot size, the effect of the air gap, and the effect of multiple-layer structures on the ellipticity of the spot.

引用

收藏

页码：128 / 137

页数：10

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