Spatial distribution of carbon species in laser ablation of graphite target

被引:25
作者
Ikegami, T
Ishibashi, S
Yamagata, Y
Ebihara, K
Thareja, RK
Narayan, J
机构
[1] Kumamoto Univ, Dept Elect & Comp Engn, Kumamoto 8608555, Japan
[2] Indian Inst Technol, Kanpur 208016, Uttar Pradesh, India
[3] N Carolina State Univ, Raleigh, NC 27695 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2001年 / 19卷 / 04期
关键词
D O I
10.1116/1.1381403
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report on the temporal evolution and spatial distribution Of C-2 and C-3 molecules produced by KrF laser ablation of a graphite target using laser induced fluorescence imaging and optical emission spectroscopy. Spatial density profiles Of C-2 were measured using two-dimensional fluorescence in various pressures of different ambient (vacuum, nitrogen, oxygen, hydrogen, helium, and argon) gases at various ablation laser fluences and ablation area. A large yield Of C-2 is observed in the central part of the plume and near the target surface and its density and distribution was affected by the laser fluence and ambient gas. Fluorescent C-3 was studied in Ar gas and the yield Of C-3 is enhanced at higher gas pressure and longer delay times after ablation. (C) 2001 American Vacuum Society.
引用
收藏
页码:1304 / 1307
页数:4
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