Nanoporous ultra-low-κ films prepared from fluorinated polyimide with grafted poly(acrylic acid) side chains

被引：117

作者：

Wang, WC

Vora, RH

Kang, ET

Neoh, KG

Ong, CK

Chen, LF

机构：

[1] Natl Univ Singapore, Dept Chem Engn, Singapore 119260, Singapore

[2] Natl Univ Singapore, Dept Mat Sci, Singapore 119260, Singapore

[3] Natl Univ Singapore, Dept Phys, Singapore 119260, Singapore

[4] Natl Univ Singapore, Temasek Labs, Singapore 119260, Singapore

来源：

ADVANCED MATERIALS | 2004年 / 16卷 / 01期

关键词：

D O I：

10.1002/adma.200305185

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Thermal decomposition of labile poly(acrylic acid) (PAAc) side chains grafted onto fluorinated polyimide backbones (see Figure) is used to prepare nanoporous ultra-lOW-kappa fluorinated polyimide films. The dielectric constant of the nanoporous fluorinated polyimide film can be varied by altering the graft concentration of the labile side chains.

引用

页码：54 / +

页数：5

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