Directed assembly of block copolymer blends into nonregular device-oriented structures

被引:877
作者
Stoykovich, MP
Müller, M
Kim, SO
Solak, HH
Edwards, EW
de Pablo, JJ
Nealey, PF [1 ]
机构
[1] Univ Wisconsin, Dept Biol & Chem Engn, Madison, WI 53706 USA
[2] Univ Wisconsin, Ctr Nanotechnol, Madison, WI 53706 USA
[3] Univ Wisconsin, Dept Phys, Madison, WI 53706 USA
[4] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
[5] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland
关键词
D O I
10.1126/science.1111041
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Self-assembly is an effective strategy for the creation of periodic structures at the nanoscale. However, because microelectronic devices use free-form design principles, the insertion point of self-assembling materials into existing nano-manufacturing processes is unclear. We directed ternary blends of diblock copolymers and homopolymers that naturally form periodic arrays to assemble into nonregular device-oriented structures on chemically nanopatterned substrates. Redistribution of homopolymer facilitates the defect-free assembly. in locations where the domain dimensions deviate substantially from those formed in the bulk. The ability to pattern nonregular structures using self-assembling materials creates new opportunities for nanoscale manufacturing.
引用
收藏
页码:1442 / 1446
页数:5
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