Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass

被引：7

作者：

Ben-Yakar, A ^{[1
]}

Harkin, A ^{[1
]}

Ashmore, J ^{[1
]}

Shen, MY ^{[1
]}

Mazur, E ^{[1
]}

Byer, RL ^{[1
]}

Stone, HA ^{[1
]}

机构：

[1] Stanford Univ, Dept Appl Phys, Ginzton Lab, Stanford, CA 94305 USA

来源：

PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS II | 2003年 / 4977卷

关键词：

femtosecond; laser; ablation; microfabrication; rim; glass; borosilicate; thin film; microchannels; microfluidics;

D O I：

10.1117/12.479527

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Microfluidic channels on borosilicate glass are machined using femtosecond lasers. The morphology of the ablated surface is studied using scanning microscopy. The results show micron scale features inside the channels. The formation mechanism of these features is investigated by additional experiments accompanied by a theoretical analysis of the thermal and fluid processes involved in the ultrafast laser ablation process. These studies indicate the existence of a very thin melting zone on glass and suggest that the surface morphology is formed by the plasma pressure-driven fluid motion of the melting zone during the ablation process.

引用

页码：335 / 345

页数：11

共 10 条

[1] Physics and applications of microfluidics in biology [J].

Beebe, DJ ;

Mensing, GA ;

Walker, GM .

ANNUAL REVIEW OF BIOMEDICAL ENGINEERING, 2002, 4 :261-286

[2]

BENYAKAR A, 2002, UNPUB J APPL PHYS

[3]

GIORDANO N, J PHY CONDENS MATTER, V13, pR271

[4] SURFACE TENSION OF SOME LIQUID OXIDES AND THEIR TEMPERATURE COEFFICIENTS [J].

KINGERY, WD .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1959, 42 (01) :6-10

[5] Ablation of metals by ultrashort laser pulses [J].

Nolte, S ;

Momma, C ;

Jacobs, H ;

Tunnermann, A ;

Chichkov, BN ;

Wellegehausen, B ;

Welling, H .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1997, 14 (10) :2716-2722

[6] Ultrashort-pulse laser machining of dielectric materials [J].

Perry, MD ;

Stuart, BC ;

Banks, PS ;

Feit, MD ;

Yanovsky, V ;

Rubenchik, AM .

JOURNAL OF APPLIED PHYSICS, 1999, 85 (09) :6803-6810

[7] Numerical simulations of ultrashort laser pulse ablation and plasma expansion in ambient air [J].

Vidal, F ;

Laville, S ;

Johnston, TW ;

Barthélemy, O ;

Chaker, M ;

Le Drogoff, B ;

Margot, J ;

Sabsabi, M .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2001, 56 (06) :973-986

[8]

VIDAL F, 2001, ANN M OSA LONG BEACH

[9] Microfabrication in biology and medicine [J].

Voldman, J ;

Gray, ML ;

Schmidt, MA .

ANNUAL REVIEW OF BIOMEDICAL ENGINEERING, 1999, 1 :401-425

[10]

[No title captured]

← 1 →