Ultrashort-pulse laser machining of dielectric materials

被引：440

作者：

Perry, MD ^{[1
]}

Stuart, BC ^{[1
]}

Banks, PS ^{[1
]}

Feit, MD ^{[1
]}

Yanovsky, V ^{[1
]}

Rubenchik, AM ^{[1
]}

机构：

[1] Univ Calif Lawrence Livermore Natl Lab, Livermore, CA 94550 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1999年 / 85卷 / 09期

关键词：

D O I：

10.1063/1.370197

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

There is a strong deviation from the usual tau(1/2) scaling of laser damage fluence for pulses below 10 ps in dielectric materials. This behavior is a result of the transition from a thermally dominated damage mechanism to one dominated by plasma formation on a time scale too short for significant energy transfer to the lattice. This new mechanism of damage (material removal) is accompanied by a qualitative change in the morphology of the interaction site and essentially no collateral damage. High precision machining of all dielectrics (oxides, fluorides, explosives, teeth, glasses, ceramics, SiC, etc.) with no thermal shock or distortion of the remaining material by this mechanism is described. (C) 1999 American Institute of Physics. [S0021-8979(99)01109-3].

引用

页码：6803 / 6810

页数：8

共 26 条

[1]

AMMOSOV MV, 1986, ZH EKSP TEOR FIZ, V64, P1191

[2] ACOUSTIC-PHONON RUNAWAY AND IMPACT IONIZATION BY HOT-ELECTRONS IN SILICON DIOXIDE [J].

ARNOLD, D ;

CARTIER, E ;

DIMARIA, DJ .

PHYSICAL REVIEW B, 1992, 45 (03) :1477-1480

[3] SPACE-TIME OBSERVATION OF AN ELECTRON-GAS IN SIO2 [J].

AUDEBERT, P ;

DAGUZAN, P ;

DOSSANTOS, A ;

GAUTHIR, JC ;

GEINDRE, JP ;

GUIZARD, S ;

HAMONIAUX, G ;

KRASTEV, K ;

MARTIN, P ;

PETITE, G ;

ANTONETTI, A .

PHYSICAL REVIEW LETTERS, 1994, 73 (14) :1990-1993

[4] LASER-INDUCED ELECTRIC BREAKDOWN IN SOLIDS [J].

BLOEMBER.N .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1974, QE10 (03) :375-386

[5] LASER-INDUCED BREAKDOWN BY IMPACT IONIZATION IN SIO2 WITH PULSE WIDTHS FROM 7 NS TO 150 FS [J].

DU, D ;

LIU, X ;

KORN, G ;

SQUIER, J ;

MOUROU, G .

APPLIED PHYSICS LETTERS, 1994, 64 (23) :3071-3073

[6] ELECTRON AVALANCHE BREAKDOWN BY LASER RADIATION IN INSULATING CRYSTALS [J].

HOLWAY, LH ;

FRADIN, DW .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (01) :279-291

[7]

JONES SC, 1989, OPT ENG, V28, P1039, DOI 10.1117/12.7977089

[8] Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps [J].

Kautek, W ;

Kruger, J ;

Lenzner, M ;

Sartania, S ;

Spielmann, C ;

Krausz, F .

APPLIED PHYSICS LETTERS, 1996, 69 (21) :3146-3148

[9]

Keldysh L. V., 1964, ZH EKSP TEOR FIZ, V20, P1307

[10]

KRUER WL, 1988, PHYSICS LASER PLASMA

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