Quantitative measurements of sp3 content in DLC films with Raman spectroscopy

被引：265

作者：

Cui, W. G. ^{[1
]}

Lai, Q. B. ^{[1
]}

Zhang, L. ^{[1
]}

Wang, F. M. ^{[1
]}

机构：

[1] Xiamen Univ, Dept Phys, Xiamen 361005, Fujian, Peoples R China

来源：

SURFACE & COATINGS TECHNOLOGY | 2010年 / 205卷 / 07期

基金：

中国国家自然科学基金;

关键词：

Diamond-like carbon; DLC; Raman spectra; sp(3) content; DIAMOND-LIKE CARBON; TETRAHEDRAL AMORPHOUS-CARBON; PHOTOVOLTAIC SOLAR-CELLS; THIN-FILMS; OPTICAL-PROPERTIES; STORAGE DISKS; COATINGS; DEPOSITION; PLASMA; TEMPERATURE;

D O I：

10.1016/j.surfcoat.2010.08.093

中图分类号：

TB3 [工程材料学];

学科分类号：

082905 [生物质能源与材料];

摘要：

Hydrogenated and H-free diamond-like carbon (DLC) samples were prepared and 244 nm and 514 nm Raman spectra were collected and analyzed. Correlations between Raman spectra and sp(3) content of DLC samples from this and previous studies have been analyzed. The dispersion rate of the G peak is shown to correlate linearly with the sp(3) content of hydrogenated DLC samples, while the full-width-half-maximum of the G peak is shown to correlate nonlinearly with the sp(3) content of H-free DLC samples. Quantitative relations are presented for measuring the sp(3) content of both hydrogenated and H-free DLC. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：1995 / 1999

页数：5

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