Diamond-like carbon protective anti-reflection coating for Si solar cell

被引：72

作者：

Choi, Won Seok ^{[1
,2
]}

Kim, Kyunghae ^{[1
]}

Yi, Junsin ^{[1
]}

Hong, Byungyou ^{[1
,2
]}

机构：

[1] Sungkyunkwan Univ, Sch Informat & Commun Engn, Suwon 440746, South Korea

[2] Sungkyunkwan Univ, Ctr Adv Plasma Surface Technol, Suwon 440746, South Korea

来源：

MATERIALS LETTERS | 2008年 / 62卷 / 4-5期

基金：

新加坡国家研究基金会;

关键词：

D O I：

10.1016/j.matlet.2007.06.019

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

Diamond-like carbon (DLC) films were deposited on coming glass and silicon substrates by the RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method using methane (CH4) and hydrogen (H-2) gases. We examined the effects of the CH4 to H-2 ratio on the tribological and optical properties of the DLC films. The hardness of the DLC films was measured with a nano-indenter. The optical properties of the DLC thin film were investigated by UV/VIS spectrometry and ellipsometry. From these measurements, we obtained optimum anti-reflection coating at a methane flow rate of 20 sccm. Also, solar cells were fabricated on a silicon substrate using the optimized DLC films as an anti-reflection coating and we obtained an increase of solar cell efficiency of about 20%. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：577 / 580

页数：4

共 14 条

[1]

LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].