SUMMARY ABSTRACT - THE USE OF INTERMEDIATE LAYERS TO IMPROVE THE ADHERENCE OF DIAMOND-LIKE CARBON-FILMS ON ZNS AND ZNSE

被引:21
作者
MIRTICH, MJ
NIR, D
SWEC, D
BANKS, B
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期
关键词
D O I
10.1116/1.573704
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:2680 / 2681
页数:2
相关论文
共 5 条
  • [1] Angus J. C., 1982, Metastable Materials Formation by Ion Implantation. Proceedings of the Materials Research Society Annual Meeting, P433
  • [2] DUAL-ION-BEAM DEPOSITION OF CARBON-FILMS WITH DIAMOND-LIKE PROPERTIES
    MIRTICH, MJ
    SWEC, DM
    ANGUS, JC
    [J]. THIN SOLID FILMS, 1985, 131 (3-4) : 245 - 254
  • [3] MIRTICH MJ, 1981, J VAC SCI TECHNOL, V19, P186
  • [4] MIRTICH MJ, 1981, 1981 AM I AER ASTR M
  • [5] MIRTICH MJ, 1985, 12TH INT C MET COAT