DUAL-ION-BEAM DEPOSITION OF CARBON-FILMS WITH DIAMOND-LIKE PROPERTIES

被引：40

作者：

MIRTICH, MJ ^{[1
]}

SWEC, DM ^{[1
]}

ANGUS, JC ^{[1
]}

机构：

[1] CASE WESTERN RESERVE UNIV,CLEVELAND,OH 44106

来源：

关键词：

D O I：

10.1016/0040-6090(85)90144-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：245 / 254

页数：10

共 17 条

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