Ultranarrow AuPd and Al wires

In this letter, we discuss a versatile template technique aimed to the fabrication of sub-10 nm wide wires. Using this technique, we have measured AuPd wires, 12 nm wide and as long as 20 mu m. Even materials that form a strong superficial oxide, and thus not suited to be used in combination with other techniques, can be employed. In particular, we have measured Al wires, with lateral width smaller or comparable to 10 nm, and length exceeding 10 mu m. (c) 2005 American Institute of Physics.