High birefringence control and polarization insensitive Bragg grating fabricated in PECVD planar waveguide with UV polarized irradiation

被引：4

作者：

Dai, X ^{[1
]}

Mihailov, SJ ^{[1
]}

Blanchetière, C ^{[1
]}

Callender, CL ^{[1
]}

Walker, RB ^{[1
]}

机构：

[1] Commun Res Ctr, Ottawa, ON K2H 8S2, Canada

来源：

OPTICS COMMUNICATIONS | 2005年 / 248卷 / 1-3期

关键词：

UV polarized irradiation; UV induced birefringence; polarization insensitivity Bragg grating; PECVD planar waveguide; hydrogen loading; anneal; dichroic absorption;

D O I：

10.1016/j.optcom.2004.11.093

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A method for rapid compensation of high intrinsic birefringence in plasma-enhanced chemical vapor deposition (PECVD) based planar waveguides is presented. The intrinsic waveguide bireftingence is compensated by a large UV induced opposite birefringence generated with polarized UV ArF excimer laser irradiation (oriented normal to the waveguide axis) and enhanced further through hydrogen loading. The fabrication of polarization insensitive Bragg gratings in PECVD planar waveguides with a large intrinsic birefringence of 6.3 x 10(-4) is demonstrated by trimming it to zero birefringence with a low fluence blanket UV polarized exposure. After annealing for removal of the hydrogen, the polarization insensitive nature of the Bragg grating is unchanged. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：123 / 130

页数：8

共 19 条

[1] Polarisation-independent strong Bragg gratings in planar lightwave circuits [J].