共 6 条
[1]
IRWIN RS, 1998, P ISA 44 INT INSTR S, P256
[2]
Development of advanced second-generation micromirror devices fabricated in a four-level, planarized surface micromachined polycrystalline silicon process
[J].
SPATIAL LIGHT MODULATORS,
1998, 3292
:71-80
[3]
Design and fabrication of optical MEMS using a four-level, planarized, surface-micromachined polycrystalline silicon process
[J].
MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS III,
1998, 3276
:48-55
[4]
Micromirror arrays fabricated by flip-chip assembly
[J].
MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MEMS,
1999, 3878
:68-79
[5]
MICHALICEK MA, 1995, P ASME DSC, V57, P981
[6]
MICHALICEK MA, 1997, P 2 ANN IEEE INT C I, P144