Calibration of a Shack-Hartmann sensor for absolute measurements of wavefronts

被引：58

作者：

Chernyshov, A

Sterr, U

Riehle, F

Helmcke, J

Pfund, J

机构：

[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany

[2] Russian Acad Sci, PN Lebedev Phys Inst, Samara Branch, Samara 443011, Russia

[3] J Pfund Optocraft GmbH, D-91058 Erlangen, Germany

来源：

APPLIED OPTICS | 2005年 / 44卷 / 30期

关键词：

D O I：

10.1364/AO.44.006419

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a method with which to calibrate a Shack-Hartmann sensor for absolute wavefront measurement of collimated laser beams. Nearly perfect spherical wavefronts originating from a singlemode fiber were used as references. After the calibration, the uncertainty of the wavefront was less than lambda/100 peak to valley across a diameter of 6 mm. For example, this method allowed us to balance aberrations and prepare collimated beams with wavefronts that are plane to lambda/500 across 1 mm. (c) 2005 Optical Society of America

引用

页码：6419 / 6425

页数：7

共 23 条

[1]

[Anonymous], 1965, PROGR OPTICS

[2] Position and displacement sensing with Shack-Hartmann wave-front sensors [J].