Pressure sensing with a flexural plate wave resonator

被引：5

作者：

Butler, MA ^{[1
]}

Hill, MK ^{[1
]}

Spates, JJ ^{[1
]}

Martin, SJ ^{[1
]}

机构：

[1] Sandia Natl Labs, Microsensor Res & Dev Dept, Albuquerque, NM 87185 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1999年 / 85卷 / 03期

关键词：

D O I：

10.1063/1.369196

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A silicon nitride membrane supported on a silicon substrate and having a sealed air cavity underneath has been used as a pressure sensor. Membrane resonances are excited and detected using conductor lines patterned on the membrane in combination with an applied magnetic field. The resonant frequency depends strongly upon membrane tension and thus the differential pressure across the membrane. (C) 1999 American Institute of Physics. [S0021-8979(99)08203-1].

引用

页码：1998 / 2000

页数：3

共 5 条

[1]

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[2] Magnetically-excited flexural plate wave resonator [J].

Martin, SJ ;

Butler, MA ;

Spates, JJ ;

Schubert, WK ;

Mitchell, MA .

PROCEEDINGS OF THE 1997 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, 1997, :25-31

[3] Flexural plate wave resonator excited with Lorentz forces [J].

Martin, SJ ;

Butler, MA ;

Spates, JJ ;

Mitchell, MA ;

Schubert, WK .

JOURNAL OF APPLIED PHYSICS, 1998, 83 (09) :4589-4601

[4]

WENZEL SW, 1989, P IEEE ULTRASON S, P595

[5] FLUID LOADING OF A LAMB-WAVE SENSOR [J].

WHITE, RM ;

WENZEL, SW .

APPLIED PHYSICS LETTERS, 1988, 52 (20) :1653-1655

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