Flexural plate wave resonator excited with Lorentz forces

被引：31

作者：

Martin, SJ ^{[1
]}

Butler, MA ^{[1
]}

Spates, JJ ^{[1
]}

Mitchell, MA ^{[1
]}

Schubert, WK ^{[1
]}

机构：

[1] Sandia Natl Labs, Microsensor Res & Dev Dept, Albuquerque, NM 87185 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1998年 / 83卷 / 09期

关键词：

D O I：

10.1063/1.367242

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A flexural plate wave resonator was constructed by patterning current lines on a silicon nitride membrane suspended on a rectangular silicon frame. Eigenmodes of the rectangular membrane were excited using Lorentz forces generated between alternating surface currents and a static in-plane magnetic field. Preferential coupling to a particular membrane mode was achieved by positioning current lines along longitudinal mode antinodes. An equivalent-circuit model was derived which characterizes the input impedance of a one-port device and the transmission response of a two-port device over a range of frequencies near a single membrane resonance. Experiments were performed to characterize the device's response to changes in de magnetic field strength, ambient gas composition, gas pressure, and input power.

引用

页码：4589 / 4601

页数：13

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