Effect of fatigue on the pyroelectric and dielectric properties of PZT films

被引：12

作者：

Wang, B

Chan, HLW

Kwok, KW

Ploss, B

Choy, CL

Tong, KY

机构：

[1] Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China

[2] Hong Kong Polytech Univ, Mat Res Ctr, Hong Kong, Hong Kong, Peoples R China

[3] Hong Kong Polytech Univ, Dept Elect & Informat Engn, Hong Kong, Hong Kong, Peoples R China

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2001年 / 21卷 / 10-11期

关键词：

dielectric properties; fatigue; pyroelectric coefficient; PZT;

D O I：

10.1016/S0955-2219(01)00071-1

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3) films of thickness 1 mum were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/Si substrates. The crystallization of the films was studied by X-ray diffraction. The pyroelectric coefficient and dielectric permittivity of the PZT films were also investigated. It is well known that the use of oxide electrodes can reduce fatigue in PZT thin films. In this work, the effect of fatigue on the dielectric and pyroelectric properties of 1 mum thick PZT films was studied by comparing these properties before and after fatigue tests. As a fatigued film has lower switchable polarization, this study will reveal the correlation between dielectric and pyroelectric properties of PZT films and switchable polarization. (C) 2001 Published by Elsevier Science Ltd.

引用

页码：1589 / 1592

页数：4

共 13 条

[11] FERROELECTRIC MEMORIES [J].