Time-resolved measurements of the electron energy distribution function in a helicon plasma

被引：47

作者：

Blackwell, DD ^{[1
]}

Chen, FF ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2001年 / 10卷 / 02期

关键词：

D O I：

10.1088/0963-0252/10/2/312

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

An energy analyser with the capability of making time-resolved measurements of the instantaneous electron current in a radiofrequency (RF) plasma has been designed and constructed. This current is then reconstructed into the instantaneous I-V characteristic at various phases of the RF cycle. Results are shown for a helicon wave discharge under various conditions. From the first derivative of the I-V characteristic, it is observed that there is an absence of high-energy electrons characteristic of strong Landau damping, suggesting that some other mechanism is responsible for the discharge's high ionization efficiency.

引用

页码：226 / 235

页数：10

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