Compensation doping of Ba0.7Sr0.3TiO3 thin films

被引：55

作者：

Copel, M

Baniecki, JD

Duncombe, PR

Kotecki, D

Laibowitz, R

Neumayer, DA

Shaw, TM

机构：

[1] IBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USA

[2] Columbia Univ, Dept Elect Engn, New York, NY 10025 USA

来源：

APPLIED PHYSICS LETTERS | 1998年 / 73卷 / 13期

关键词：

D O I：

10.1063/1.122297

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have investigated the effects of Mn impurities on Ba0.7Sr0.3TiO3 thin films using x-ray photoemission spectroscopy. Mn acts as an electron acceptor, compensating for the charge density found in nominally undoped films. This causes a greatly increased depletion width in acceptor-doped films. We also present evidence that acceptor-doped films have an increased barrier to thermionic emission of electrons from Pt contacts into the dielectric. This may explain the decrease in leakage current observed in some acceptor-doped titanates. (C) 1998 American Institute of Physics. [S0003-6951(98)00139-9].

引用

页码：1832 / 1834

页数：3

共 10 条

[1]

Baniecki JD, 1998, MATER RES SOC SYMP P, V493, P27

[2]

CAMPION JF, 1991, CERAMIC T, V22, P477

[3] GRAIN-BOUNDARY CHEMISTRY OF BARIUM-TITANATE AND STRONTIUM-TITANATE .1. HIGH-TEMPERATURE EQUILIBRIUM SPACE-CHARGE [J].