A general-purpose software for optical characterization of thin films:: specific features for microelectronic applications

被引：42

作者：

Bosch, S ^{[1
]}

Ferré-Borrull, J ^{[1
]}

Sancho-Parramon, J ^{[1
]}

机构：

[1] Univ Barcelona, Dept Fis Aplicada & Opt, E-08028 Barcelona, Spain

来源：

SOLID-STATE ELECTRONICS | 2001年 / 45卷 / 05期

关键词：

optical characterization of materials; thin films;

D O I：

10.1016/S0038-1101(01)00092-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a detailed description of the features and capabilities of a new software for the optical characterization of thin films from spectrophotometric and/or ellipsometric measurements. The program allows the analysis of a wide range of multi-layered structures, either with respect to the composition, microstructure or thickness of any of the layers. Several spectra corresponding to different measurement techniques of a single sample may be fitted simultaneously. A short description of the dispersion models actually implemented to represent the materials is given. Several examples of use are discussed. These have been selected to illustrate important aspects that may be relevant to microelectronic applications. (C) 2001 Elsevier Science Ltd. All rights reserved.

引用

页码：703 / 709

页数：7

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