Size dependent photoluminescence from Si nanoclusters produced by laser ablation

We report a photoluminescence study of silicon nanoclusters deposited by laser ablation. This technique allows to obtain clusters with a reduced size dispersion. Taking advantage of that as well as of the possibility to tune selectively the cluster size relatively to the preparation parameters, we are able to make a fine correlation between the emission band and the corresponding emitting size. The photoluminescence band can be tuned in a wide spectral region spreading from the near ultraviolet to the near infrared depending on preparation conditions. The correlation with atomic force microscopy measurements provides a size dependence of the luminescence which is fully consistent with the quantum confinement interpretation. To our knowledge, we present here the first observation of a wide spectral range tuning of the emission bands of nanocrystalline silicon by using a dry technique compatible with clean vacuum processing. (C) 1999 Elsevier Science B.V. All rights reserved.