共 11 条
- [2] ALLEN DM, 1999, INT J ELECT MACHININ, V4, P7
- [3] A positional accuracy study of a micro-EDM machine [J]. DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 1113 - 1124
- [4] CHANG JJ, 1994, P SOC PHOTO-OPT INS, V2500, P323
- [5] DAVID B, 1991, CR187114 NASA
- [7] Ehrfeld W, 1996, P SOC PHOTO-OPT INS, V2879, P332, DOI 10.1117/12.251221
- [8] IWATA K, 1981, ANN CIRP, V30, P27
- [9] KNOWLES MRH, 1994, CIRCUITS DEVICES SEP, P39
- [10] MADOU M, 1997, FUNDAMENTALS MICROFA, P340