The hydroxylation behaviour of benzene and toluene were studied using a micro-plasma reactor, where an atmospheric non-thermal plasma was generated by a dielectric barrier discharge (DBD). The results indicated that oxidation products primarily consisted of phenol and C-4-compounds for benzene hydroxylation, whereas cresol, benzaldehyde, benzylalcohol and C4-compounds were detected for toluene hydroxylation. By taking into consideration the reaction mechanism in the plasma reactor, these products were classified into (1) oxidation of the aromatic ring and functional group on the ring and (2) cleavage of the aromatic ring or dissociation of the functional group on the ring.