SPM-based nanofabrication using a synchronization technique

被引：13

作者：

Song, JQ ^{[1
]}

Liu, ZF ^{[1
]}

Li, CZ ^{[1
]}

Chen, HF ^{[1
]}

He, HX ^{[1
]}

机构：

[1] Peking Univ, Coll Chem & Mol Engn, Ctr Intelligent Mat Res, Beijing 100871, Peoples R China

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 66卷 / Suppl 1期

关键词：

D O I：

10.1007/s003390051228

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Various nanostructures have been fabricated on Au, Au/Pd, highly oriented pyrolytic graphite (HOPG) etc. based on mechanical machining and held evaporation by using the novel nanofabrication system developed in this laboratory. The basic idea is to transfer the given pattern into an encoded voltage pulse series, and then synchronize it with scanning probe microscopy (SPM) scanning. Depending on the method of applying voltage different lithography functions can be obtained: (1) electric field-based nanofabrication can be performed by imposing the voltage across the tip-substrate gap; or (2) nanomachining can be realized by using the voltage to adjust the setpoint force of AFM. The system has great versatility in creating arbitrary nanopatterns with well-controlled features. It is also very easy and fast to optimize the lithography parameters for a specific lithography mechanism. Field evaporation of gold atoms from AFM/STM tips and mechanical indentation by sharp AFM tips have been conducted to show the various functions of the developed nanofabrication system.

引用

页码：S715 / S717

页数：3

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