Scanning and transmission electron microscope investigation of preferential thinning during ion beam milling of an Al-Ag alloy containing γ precipitate plates and the subsequent effects on microanalysis

被引:9
作者
Moore, KT [1 ]
Howe, JM [1 ]
Csontos, AA [1 ]
机构
[1] Univ Virginia, Dept Mat Sci & Engn, Charlottesville, VA 22903 USA
基金
美国国家科学基金会;
关键词
SEM; TEM; EFTEM; EDXS; ion-beam milling; Al-Ag alloy; precipitate;
D O I
10.1016/S0304-3991(98)00081-3
中图分类号
TH742 [显微镜];
学科分类号
摘要
This paper demonstrates how a combination of high-resolution field-emission gun scanning and transmission electron microscope (TEM) techniques, including bright-field TEM imaging, two-detector secondary electron imaging, energy-dispersive X-ray spectroscopy (EDXS) and energy-filtering transmission electron microscopy (EFTEM), can be used to unambiguously determine the degree of preferential thinning during ion beam milling of an Al alloy containing thin plate-shaped precipitates, and illustrates the problems incurred by differential thinning of specimens on EDXS data and EFTEM images. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:195 / 202
页数:8
相关论文
共 20 条
[1]   NEW INSIGHT INTO THE DEVELOPMENT OF PYRAMIDAL STRUCTURES ON BOMBARDED COPPER SURFACES [J].
AUCIELLO, O ;
KELLY, R ;
IRICIBAR, R .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 46 (1-2) :105-117
[2]  
Auciello O., 1984, Ion bombardment modification of surfaces: fundamentals and applications
[3]   ANALYSIS OF THE DEVELOPMENT OF LARGE AREA SURFACE-TOPOGRAPHY DURING ION ETCHING [J].
BARNA, A ;
BARNA, PB ;
ZALAR, A .
VACUUM, 1990, 40 (1-2) :115-120
[4]   ION-BEAM INDUCED ROUGHNESS AND ITS EFFECT IN AES DEPTH PROFILING OF MULTILAYER NI/CR THIN-FILMS [J].
BARNA, A ;
BARNA, PB ;
ZALAR, A .
SURFACE AND INTERFACE ANALYSIS, 1988, 12 (1-12) :144-150
[5]  
BARNA A, 1987, YB 86 87 RES I TECHN, P86
[6]  
BENTLEY J, 1995, MICROSC MICROANAL, P268
[7]  
Goldstein JI, 1992, SCANNING ELECT MICRO
[8]  
GOLLA U, 1997, MICRON, V28, P379
[9]  
GOODHEW PJ, 1972, THIN FOIL PREPARATIO
[10]   Improved imaging of secondary phases in solids by energy-filtering TEM [J].
Hofer, F ;
Warbichler, P .
ULTRAMICROSCOPY, 1996, 63 (01) :21-25