BaPbO3 perovskite electrode for lead zirconate titanate ferroelectric thin films

被引：46

作者：

Luo, YR ^{[1
]}

Wu, JM ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2001年 / 79卷 / 22期

关键词：

D O I：

10.1063/1.1421088

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

BaPbO3 (BPO) films were prepared by rf-magnetron sputtering at temperatures as low as 350 degreesC. These films possessed low electrical resistivity of 1.4x10(-3) Omega cm, which is appropriate for electrodes. The BPO electrode has an advantage over a Pt electrode in that it lowers the crystallization temperature of Pb(Zr0.53Ti0.47)O-3 (PZT) films from 600 to 550 degreesC. The coercive fields of the PZT films deposited on a BPO/Pt electrode are significantly lower than those deposited on the Pt electrode, but the remanent polarization remained essentially unchanged. The BPO electrode also improved the fatigue resistance and decreased the leakage current of the PZT films deposited. (C) 2001 American Institute of Physics.

引用

页码：3669 / 3671

页数：3

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