Fabrication of diffraction-encoded micro-particles using nano-imprint lithography

被引：19

作者：

Banu, Shahanara ^{[1
]}

Birtwell, Sam

Galitonov, Gerasim

Chen, Yifang

Zheludev, Nikolay

Morgan, Hywel

机构：

[1] Univ Southampton, Sch Chem, Southampton SO17 1BJ, Hants, England

[2] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England

[3] Univ Southampton, Sch Elect & Comp Sci, Southampton SO17 1BJ, Hants, England

[4] Rutherford Appleton Lab, Didcot OX11 0QX, Oxon, England

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2007年 / 17卷 / 07期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1088/0960-1317/17/7/S08

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A nano-imprint lithography technique is described for the fabrication of optically encoded micro-particles (diffractive barcodes). The particles are fabricated from SU8-a material which can be processed lithographically, and which can be used for the attachment of molecular tags. The barcodes are identified by their unique diffraction patterns.

引用

页码：S116 / S121

页数：6

共 28 条

[1]

BIRTWELL SW, 2007, UNPUB OPT COMMUN

[2] Integrated microfluidics based on multi-layered SU-8 for mass spectrometry analysis [J].

Carlier, J ;

Arscott, S ;

Thomy, V ;

Fourrier, JC ;

Caron, F ;

Camart, JC ;

Druon, C ;

Tabourier, P .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (04) :619-624

[3]

CAVALLI G, 2007, IN PRESS J COMB CHEM

[4] An integrated optical oxygen sensor fabricated using rapid-prototyping techniques [J].

Chang-Yen, DA ;

Gale, BK .

LAB ON A CHIP, 2003, 3 (04) :297-301

[5] One-step lithography for various size patterns with a hybrid mask-mold [J].

Cheng, X ;

Guo, LJ .

MICROELECTRONIC ENGINEERING, 2004, 71 (3-4) :288-293

[6] Rare earth-doped glass microbarcodes [J].

Dejneka, MJ ;

Streltsov, A ;

Pal, S ;

Frutos, AG ;

Powell, CL ;

Yost, K ;

Yuen, PK ;

Müller, U ;

Lahiri, J .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2003, 100 (02) :389-393

[7]

Evans M, 2003, ASSAY DRUG DEV TECHN, V1, P199

[8] High capacity tagging using nanostructured diffraction barcodes [J].

Galitonov, GS ;

Birtwell, SW ;

Zheludev, NI ;

Morgan, H .

OPTICS EXPRESS, 2006, 14 (04) :1382-1387

[9] Recent progress in nanoimprint technology and its applications [J].

Guo, LJ .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2004, 37 (11) :R123-R141

[10] High throughput particle analysis: Combining dielectrophoretic particle focussing with confocal optical detection [J].

Holmes, D ;

Morgan, H ;

Green, NG .

BIOSENSORS & BIOELECTRONICS, 2006, 21 (08) :1621-1630

← 1 2 3 →