Fabrication of diffraction-encoded micro-particles using nano-imprint lithography

被引:19
作者
Banu, Shahanara [1 ]
Birtwell, Sam
Galitonov, Gerasim
Chen, Yifang
Zheludev, Nikolay
Morgan, Hywel
机构
[1] Univ Southampton, Sch Chem, Southampton SO17 1BJ, Hants, England
[2] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England
[3] Univ Southampton, Sch Elect & Comp Sci, Southampton SO17 1BJ, Hants, England
[4] Rutherford Appleton Lab, Didcot OX11 0QX, Oxon, England
基金
英国工程与自然科学研究理事会;
关键词
D O I
10.1088/0960-1317/17/7/S08
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A nano-imprint lithography technique is described for the fabrication of optically encoded micro-particles (diffractive barcodes). The particles are fabricated from SU8-a material which can be processed lithographically, and which can be used for the attachment of molecular tags. The barcodes are identified by their unique diffraction patterns.
引用
收藏
页码:S116 / S121
页数:6
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