Fabrication of diffraction-encoded micro-particles using nano-imprint lithography

被引：19

作者：

Banu, Shahanara ^{[1
]}

Birtwell, Sam

Galitonov, Gerasim

Chen, Yifang

Zheludev, Nikolay

Morgan, Hywel

机构：

[1] Univ Southampton, Sch Chem, Southampton SO17 1BJ, Hants, England

[2] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England

[3] Univ Southampton, Sch Elect & Comp Sci, Southampton SO17 1BJ, Hants, England

[4] Rutherford Appleton Lab, Didcot OX11 0QX, Oxon, England

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2007年 / 17卷 / 07期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1088/0960-1317/17/7/S08

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A nano-imprint lithography technique is described for the fabrication of optically encoded micro-particles (diffractive barcodes). The particles are fabricated from SU8-a material which can be processed lithographically, and which can be used for the attachment of molecular tags. The barcodes are identified by their unique diffraction patterns.

引用

页码：S116 / S121

页数：6

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