Modeling of two-dimensional radio-frequency methane glow discharge in cylindrical geometry

被引:6
作者
Bera, K [1 ]
Farouk, B
Lee, Y
机构
[1] Drexel Univ, Dept Mech Engn & Mech, Philadelphia, PA 19104 USA
[2] Drexel Univ, Dept Chem Engn, Philadelphia, PA 19104 USA
关键词
modeling; methane; glow discharge; deposition; discharge physics; DC bias; capacitively coupled; radio-frequency;
D O I
10.1299/jsmeb.41.429
中图分类号
O414.1 [热力学];
学科分类号
摘要
A self-consistent two-dimensional three moment radio-frequency glow discharge model has been developed for methane feed gas using a fluid model to study the charged species dynamics and its effects on deposition in a polyatomic gas discharge. Swarm data as a function of electron energy are provided as input to the model. The discharge is electropositive since positive ion density is more than negative ion density. The importance of two-dimensional modeling has been emphasized by comparing the plasma variables with those of a one-dimensional model. The model predicts both the radial and axial variations of species densities, electron energy and electric field. The off-axis maxima in species densities, typical for two-dimensional discharge, can be observed. The asymmetry of the discharge generates a self de bias that has been predicted by a trial and error method. The model also calculates the radial variations of species fluxes to the cathode that are important to predict the film deposition.
引用
收藏
页码:429 / 435
页数:7
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