DIAGNOSTICS AND MODELING OF A METHANE PLASMA USED IN THE CHEMICAL VAPOR-DEPOSITION OF AMORPHOUS-CARBON FILMS

[1] REACTIONS OF HYDROCARBON IONS WITH HYDROGEN AND METHANE AT 300 K [J]. CHEMICAL PHYSICS LETTERS, 1977, 47 (02) : 383 - 387

[2] A REVIEW OF RECENT WORK ON HARD I-C FILMS [J]. THIN SOLID FILMS, 1981, 86 (2-3) : 193 - 200

[3] Bardsley J. N., 1970, ADV ATOM MOL PHYS, V6, pI, DOI [DOI 10.1016/S0065-2199(08)60202-X, 10.1016/S0065-308X(08)00607-6, DOI 10.1016/S0065-308X(08)00607-6]

[4] PRESSURE SHIFT AND BROADENING OF METHANE LINE AT 3.39 MU STUDIED BY LASER-SATURATED MOLECULAR ABSORPTION [J]. PHYSICAL REVIEW LETTERS, 1969, 22 (01) : 4 - +

[5] ION-MOLECULE REACTIONS OF 1,3-BUTADIENE, OF ACETYLENE AND OF ACETYLENE-METHANE MIXTURES [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1959, 63 (06) : 825 - 828

[6] ELECTRON ENERGY DISTRIBUTIONS IN PLASMAS .1. [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1959, 250 (1260): : 53 - 69

[7] AUTOMATIC PLOTTING DEVICE FOR SECOND DERIVATIVE OF LANGMUIR PROBE CURVES [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1963, 34 (03) : 231 - &

[8] BRODSKY MH, 1979, AMORPHOUS SEMICONDUC

[9] OPTICAL-PROPERTIES OF HYDROGENATED HARD CARBON THIN-FILMS [J]. THIN SOLID FILMS, 1982, 91 (01) : 81 - 87

[10] SOME ION-MOLECULE REACTIONS OF H3+ AND PROTON AFFINITY OF H2 [J]. JOURNAL OF CHEMICAL PHYSICS, 1970, 52 (12) : 6062 - &

[1] REACTIONS OF HYDROCARBON IONS WITH HYDROGEN AND METHANE AT 300 K [J]. CHEMICAL PHYSICS LETTERS, 1977, 47 (02) : 383 - 387

[2] A REVIEW OF RECENT WORK ON HARD I-C FILMS [J]. THIN SOLID FILMS, 1981, 86 (2-3) : 193 - 200

[3] Bardsley J. N., 1970, ADV ATOM MOL PHYS, V6, pI, DOI [DOI 10.1016/S0065-2199(08)60202-X, 10.1016/S0065-308X(08)00607-6, DOI 10.1016/S0065-308X(08)00607-6]

[4] PRESSURE SHIFT AND BROADENING OF METHANE LINE AT 3.39 MU STUDIED BY LASER-SATURATED MOLECULAR ABSORPTION [J]. PHYSICAL REVIEW LETTERS, 1969, 22 (01) : 4 - +

[5] ION-MOLECULE REACTIONS OF 1,3-BUTADIENE, OF ACETYLENE AND OF ACETYLENE-METHANE MIXTURES [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1959, 63 (06) : 825 - 828

[6] ELECTRON ENERGY DISTRIBUTIONS IN PLASMAS .1. [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1959, 250 (1260): : 53 - 69

[7] AUTOMATIC PLOTTING DEVICE FOR SECOND DERIVATIVE OF LANGMUIR PROBE CURVES [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1963, 34 (03) : 231 - &

[8] BRODSKY MH, 1979, AMORPHOUS SEMICONDUC

[9] OPTICAL-PROPERTIES OF HYDROGENATED HARD CARBON THIN-FILMS [J]. THIN SOLID FILMS, 1982, 91 (01) : 81 - 87

[10] SOME ION-MOLECULE REACTIONS OF H3+ AND PROTON AFFINITY OF H2 [J]. JOURNAL OF CHEMICAL PHYSICS, 1970, 52 (12) : 6062 - &