DIAGNOSTICS AND MODELING OF A METHANE PLASMA USED IN THE CHEMICAL VAPOR-DEPOSITION OF AMORPHOUS-CARBON FILMS

[11] KINETICS OF CH RADICAL REACTIONS WITH SELECTED MOLECULES AT ROOM-TEMPERATURE [J]. CHEMICAL PHYSICS, 1981, 56 (03) : 355 - 365

[12] DISSOCIATION OF MOLECULAR HYDROGEN BY ELECTRON IMPACT [J]. JOURNAL OF CHEMICAL PHYSICS, 1965, 43 (12) : 4381 - &

[13] DAINTON FS, 1959, T FARADAY SOC, V55, P929

[14] ION-MOLECULE REACTIONS IN METHANE + IN ETHANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1964, 40 (01) : 5 - &

[15] Doi A., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1137

[16] The Low Arc Volt [J]. ZEITSCHRIFT FUR PHYSIK, 1930, 64 (11-12): : 781 - 798

[17] GAS PHASE IONIC REACTIONS - METHANE AND ETHYLENE [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1956, 78 (21) : 5697 - 5698

[18] FONER SN, 1966, ADV ATOM MOL PHYS, V2, P385

[19] FUCHS R, 1961, Z NATURFORSCH PT A, VA 16, P1026

[20] GALLAGHER A, 1983, UNPUB SOLAR ENERGY R

[11] KINETICS OF CH RADICAL REACTIONS WITH SELECTED MOLECULES AT ROOM-TEMPERATURE [J]. CHEMICAL PHYSICS, 1981, 56 (03) : 355 - 365

[12] DISSOCIATION OF MOLECULAR HYDROGEN BY ELECTRON IMPACT [J]. JOURNAL OF CHEMICAL PHYSICS, 1965, 43 (12) : 4381 - &

[13] DAINTON FS, 1959, T FARADAY SOC, V55, P929

[14] ION-MOLECULE REACTIONS IN METHANE + IN ETHANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1964, 40 (01) : 5 - &

[15] Doi A., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1137

[16] The Low Arc Volt [J]. ZEITSCHRIFT FUR PHYSIK, 1930, 64 (11-12): : 781 - 798

[17] GAS PHASE IONIC REACTIONS - METHANE AND ETHYLENE [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1956, 78 (21) : 5697 - 5698

[18] FONER SN, 1966, ADV ATOM MOL PHYS, V2, P385

[19] FUCHS R, 1961, Z NATURFORSCH PT A, VA 16, P1026

[20] GALLAGHER A, 1983, UNPUB SOLAR ENERGY R