Peculiarities of nitrogen dioxide detection with sprayed undoped and indium-doped zinc oxide thin films

被引：65

作者：

Ferro, R. ^{[1
]}

Rodriguez, J. A. ^{[1
]}

Bertrand, P. ^{[2
]}

机构：

[1] Univ Havana, Fac Phys, Vedado 10400, Habana, Cuba

[2] Catholic Univ Louvain, Dept Mat Sci & Proc, B-1348 Louvain, Belgium

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 08期

关键词：

zinc oxide; nitrogen dioxide; sensors; semiconductors;

D O I：

10.1016/j.tsf.2007.07.189

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nitrogen dioxide (NO2) sensors based on sprayed zinc oxide (ZnO) thin films have been prepared. The effect of the film thickness and the In-doping on the sensor performance (sensor response and resistance) is analyzed. By adding 3 wt.% of indium nitrate to the spraying solution it is possible to enhance the film-gas response to 5 ppm of NO2 at 275 degrees C. At the same time the film resistance is sensibly reduced. The film crystallographic structure, morphology and additive content are studied by means of X-ray Diffraction, Scanning Electron Microscopy, X-ray Photoelectron Spectroscopy and Atomic Force Microscopy. The possible sensitization mechanism is discussed. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：2225 / 2230

页数：6

共 19 条

[1] STRUCTURE OF TIN OXIDE LAYERS AND OPERATING TEMPERATURE AS FACTORS DETERMINING THE SENSITIVITY PERFORMANCES TO NO(X) [J].