Silicon-based group IV heterostructures for optoelectronic applications

被引:73
作者
Sorel, RA
机构
[1] USAF Rome Laboratory, RL/EROC, Hanscom AFB
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1996年 / 14卷 / 03期
关键词
D O I
10.1116/1.580414
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This article presents an overview of trends and progress in group IV heterostructures for optoelectronics. The outlook is good in electronics because the commercialization of SiGe/Si heterotransitors is proceeding nicely. However, the pace of progress is slower in SiGe/Si photonics. This article covers five innovative topics in an effort to enhance the development of heterostructure photonics: (1) band-gap studies of SiGeC, an alloy that can be lattice matched to Si, (2) direct-band-gap, strained heterostructures of GeSn upon GeSi/Si, (3) silicon-based quantum-well intersubband lasers (ISBLs) including SiGe/Si quantum-cascade, Raman, and inversionless ISBLs, (4) 1.5 mu m ISBLs based on Si quantum wells with high barriers, such as heterosystems of Si/ZnS, and Si with SiO2/Si strained superlattice barriers, and (5) low-cost substrates of 3C SiC upon SiO2/Si, a platform for SiC heterodevices and for InGaN/AlGaN heterodevices.
引用
收藏
页码:913 / 918
页数:6
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