A low-loss composition region identified from a thin-film composition spread of (Ba1-x-ySrxCay) TiO3

被引：106

作者：

Chang, H ^{[1
]}

Takeuchi, I ^{[1
]}

Xiang, XD ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA

来源：

APPLIED PHYSICS LETTERS | 1999年 / 74卷 / 08期

关键词：

D O I：

10.1063/1.123475

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have generated the thin-film ternary composition spread of (Ba1-x-ySrxCay)TiO3 on an equilateral-triangle-shaped LaAlO3 substrate. Compositional variation within the triangle was achieved by a precisely controlled shutter system inside a pulsed laser deposition chamber, which allows the deposition of precursors with gradient thickness over the length of the substrate. Appropriate postannealing afforded high-quality epitaxial thin films over almost the entire composition region. Mapping of the microwave dielectric properties of the composition-spread chip was performed using a scanning evanescent microwave microscope at 1 GHz. Composition region Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3 was found to have desirable properties for electronic applications. (C) 1999 American Institute of Physics. [S0003-6951(99)03508-1].

引用

页码：1165 / 1167

页数：3

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