Changes in porosity and amounts of adsorbed water in sol-gel derived porous silica films with heat treatment

被引:25
作者
Matsuda, A [1 ]
Matsuno, Y
Tatsumisago, M
Minami, T
机构
[1] Univ Osaka Prefecture, Grad Sch Engn, Dept Appl Mat Sci, Sakai, Osaka 5998531, Japan
[2] Nippon Sheet Glass Co Ltd, Chuo Ku, Osaka 5418559, Japan
关键词
sol-gel; coating; porosity; poly(ethyleneglycol); refractive index;
D O I
10.1023/A:1008788004762
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Porous silica films were obtained by a heat treatment of poly(ethyleneglycol)-containing gels for micro-patterning. Changes in porosity and the amount of adsorbed water with the heat treatment temperature in the silica films were evaluated from the refractive index of the films. The apparent refractive index of the silica films in an ambient atmosphere was much higher than the intrinsic refractive index of the film due to the large amount of adsorbed water in the films. The amount of adsorbed water in the films decreased with an increase in the heat treatment temperature and became almost zero after a heat treatment at 850 degreesC. The decrease in the amount of adsorbed water in the films was caused by the decrease in silanol groups, which acted as the sites for water adsorption in the films. The drastic decreases in thickness and in porosity of the films at temperatures from 850 to 950 degreesC occurred after the disappearance of silanol groups in the films. The densification of the films due to collapse of the pores at high temperatures should have resulted from the viscous flow of silica network.
引用
收藏
页码:129 / 134
页数:6
相关论文
共 17 条
  • [1] Deposition of micropatterned coating using an ink-jet technique
    Danzebrink, R
    Aegerter, MA
    [J]. THIN SOLID FILMS, 1999, 351 (1-2) : 115 - 118
  • [2] PHYSICAL AND CHEMICAL ASPECTS IN THE APPLICATION OF THIN-FILMS ON OPTICAL-ELEMENTS
    GUENTHER, KH
    [J]. APPLIED OPTICS, 1984, 23 (20): : 3612 - 3632
  • [3] Kamiya K., 1978, Yogyo-Kyokai-Shi, V86, P552, DOI 10.2109/jcersj1950.86.999_552
  • [4] POROSITY OF MGF2 FILMS - EVALUATION BASED ON CHANGES IN REFRACTIVE INDEX DUE TO ADSORPTION OF VAPORS
    KINOSITA, K
    NISHIBORI, M
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (04): : 730 - +
  • [5] Matsuda A, 1998, J AM CERAM SOC, V81, P2849, DOI 10.1111/j.1151-2916.1998.tb02705.x
  • [6] Optical disk substrate fabricated by the sol-gel method
    Matsuda, A
    Matsuno, Y
    Mitsuhashi, Y
    Tohge, N
    Minami, T
    [J]. SOL-GEL PRODUCTION, 1998, 150 : 111 - 119
  • [7] STRUCTURAL-CHANGES OF SOL GEL-DERIVED TIO2-SIO2 COATINGS IN AN ENVIRONMENT OF HIGH-TEMPERATURE AND HIGH HUMIDITY
    MATSUDA, A
    KOGURE, T
    MATSUNO, Y
    KATAYAMA, S
    TSUNO, T
    TOHGE, N
    MINAMI, T
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1993, 76 (11) : 2899 - 2903
  • [8] MATSUDA A, 1994, NIPPON SERAM KYO GAK, V102, P330, DOI 10.2109/jcersj.102.330
  • [9] MATSUDA A, 1990, SPIE P SOL GEL OPTIC, V1328, P62
  • [10] Preparation of micropatterns with profile heights up to 30 microns from silica sols.
    Mennig, M
    Gier, A
    Krug, H
    Schmidt, H
    [J]. SOL-GEL OPTICS IV, 1997, 3136 : 480 - 485