POROSITY OF MGF2 FILMS - EVALUATION BASED ON CHANGES IN REFRACTIVE INDEX DUE TO ADSORPTION OF VAPORS

被引：77

作者：

KINOSITA, K

NISHIBORI, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 04期

关键词：

D O I：

10.1116/1.1315743

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：730 / +

页数：1

共 14 条

[1]

BOUSQUET P, 1956, OPT ACTA, V3, P153

[2]

BOUSQUET P, 1957, ANN PHYS-PARIS, V2, P163

[3]

DOI Y, 1958, 27 GOVT MECH LAB REP

[4] OPTICAL PROPERTIES OF MAGNESIUM FLUORIDE FILMS IN THE ULTRAVIOLET [J].

HALL, JF .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1957, 47 (07) :662-665

[5] DIELECTRIC THIN FILMS [J].

HEAVENS, OS ;

SMITH, SD .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1957, 47 (06) :469-472

[6] REFRACTIVE INDEX AND PORE STRUCTURE OF ACID-LEACHED SURFACE LAYER OF GLASS [J].

KINOSITA, K .

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1961, 16 (04) :807-+

[7]

KINOSITA K, 1960, OYO BUTURI, V29, P205

[8]

KINOSITA K, TO BE PUBLISHED

[9] PROPERTIES OF INSULATING THIN FILMS DEPOSITED BY RF SPUTTERING [J].

PLISKIN, WA ;

DAVIDSE, PD ;

LEHMAN, HS ;

MAISSEL, LI .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1967, 11 (04) :461-&

[10] STRUCTURAL EVALUATION OF SILICON OXIDE FILMS [J].

PLISKIN, WA ;

LEHMAN, HS .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (10) :1013-&

← 1 2 →