Growth and characterization of indium tin oxide thin films deposited on PET substrates

被引：64

作者：

Lee, Jaehyeong ^{[1
]}

Jung, Hakkee ^{[1
]}

Lee, Jongin ^{[1
]}

Lim, Donggun ^{[2
]}

Yang, Keajoon ^{[2
]}

Yi, Junsin ^{[3
]}

Song, Woo-Chang ^{[4
]}

机构：

[1] Kunsan Natl Univ, Sch Elect & Informat Engn, Kunsan, South Korea

[2] Chungju Natl Univ, Dept Elect Engn, Chungju, South Korea

[3] Sungkyunkwan Univ, Sch Informat & Commun Engn, Suwon, South Korea

[4] Kangwon Natl Univ, Dept Elect Engn, Samcheok, South Korea

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 07期

关键词：

indium tin oxide (ITO); sputtering; polyethylene terephthalate (PET); electrical properties; optical properties;

D O I：

10.1016/j.tsf.2007.05.028

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Transparent and conductive indium tin oxide (ITO) thin films were deposited onto polyethylene terephthalate (PET) by d.c. magnetron sputtering as the front and back electrical contact for applications in flexible displays and optoelectronic devices. In addition, ITO powder was used for sputter target in order to reduce the cost and time of the film formation processes. As the sputtering power and pressure increased, the electrical conductivity of ITO films decreased. The films were increasingly dark gray colored as the sputtering power increased, resulting in the loss of transmittance of the films. When the pressure during deposition was higher, however, the optical transmittance improved at visible region of light. ITO films deposited onto PET have shown similar optical transmittance and electrical resistivity, in comparison with films onto glass substrate. High quality films with resistivity as low as 2.5 x 10(-3) Omega cm and transmittance over 80% have been obtained on to PET substrate by suitably controlling the deposition parameters. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：1634 / 1639

页数：6

共 17 条

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