Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors

被引：55

作者：

Su, GDJ ^{[1
]}

Toshiyoshi, H ^{[1
]}

Wu, MC ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90034 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2001年 / 13卷 / 06期

关键词：

bonding; deep reactive ion etching; microelectromechanical devices; micromirrors; optical scanners; silicon-on-insulator;

D O I：

10.1109/68.924038

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a novel batch-fabrication single-crystalline silicon micromirror bonding process to fabricate optically flat micromirror on polysilicon surface-micromachined two-dimensional (2-D) scanners. The electrostatically actuated 2-D scanner has a mirror area of 460 mum x 460 mum and an optical scan angle of +/-7.5 degrees. Compared with micromirror made by standard polysilicon surface-micromachining process, the radius of curvature of the micromirror has been improved by 150 times from 1.8 to 265 cm, with surface roughness < 10 nm.

引用

页码：606 / 608

页数：3

共 22 条

[1]

AKIYAMA T, 1995, IEEE MICR SYST WORKS

[2]

BURNS DM, 1997, P SPIE INT SOC OPT E, P100

[3]

BURNS DM, 1997, P SPIE INT SOC OPT E, V2

[4] A high-speed low-voltage stress-induced micromachined 2 x 2 optical switch [J].

Chen, RT ;

Nguyen, H ;

Wu, MC .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1999, 11 (11) :1396-1398

[5]

FAN L, 1998, P IEEE LEOS SUMM TOP

[6]

FAN L, P INT SOL STAT SENS, P319

[7] Optical raster-scanning displays based on surface-micromachined polysilicon mirrors [J].

Hagelin, PM ;

Solgaard, O .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1999, 5 (01) :67-74

[8]

Han A., 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P414, DOI 10.1109/MEMSYS.2000.838553

[9] Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning [J].

Kiang, MH ;

Solgaard, O ;

Lau, KY ;

Muller, RS .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (01) :27-37

[10] Modeling, design, fabrication and measurement of a single layer polysilicon micromirror with initial curvature compensation [J].

Min, YH ;

Kim, YK .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 78 (01) :8-17

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