RHEED intensity oscillations in homoepitaxial growth of SrTiO3 films

被引:11
作者
Lee, JY [1 ]
Juang, JY [1 ]
Ou, JH [1 ]
Chen, YF [1 ]
Wu, KH [1 ]
Uen, TM [1 ]
Gou, YS [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Electrophys, Hsinchu 30050, Taiwan
来源
PHYSICA B | 2000年 / 284卷 / 284期
关键词
homoepitaxial SrTiO3 thin film; RHEED; epitaxial growth; atomic force microscopy;
D O I
10.1016/S0921-4526(99)02981-6
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The amplitude and periodicity of the reflection high-energy electron diffraction (RHEED) oscillations displayed strong temperature dependence in homoepitaxy of SrTiO3(STO) films. Combining with the AFM observations, the results suggest that the oscillations are not directly related to the layer-by-layer growth. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:2099 / 2100
页数:2
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